微细小孔的超短脉冲激光加工方法研究

摘要

Aiming at the requirements of precise and efficient processing for micro hole of aero engine fuel nozzle, the double temperature equation of ultrashort pulse (picosecond) mechanism of laser processing was used to simulate the temperature distribution of electron and grid in material. The picosecond laser processing parameters were researched. The effects of ablation threshold, scanning speed, laser polarization on the processing quality were analyzed. The experiment studies of laser pulse impacting hole and galvanometer scanning ring cutting holes for nickel base superalloy and titanium alloy material were made. The theoretical guidance and experimental basis were provided by selecting the process parameters for ultrashort pulse laser drilling.%针对航空发动机燃油喷嘴等微细小孔的精密高效加工要求，采用双温方程研究超短脉冲（皮秒）激光加工机理，模拟得出材料内电子和晶格的温度分布，开展皮秒激光加工工艺参数研究，分析烧蚀阈值、扫描速度、激光偏振态等因素对加工质量的影响规律，进行镍基高温合金和钛合金材料的激光脉冲冲击制孔和振镜扫描环切制孔实验研究，为超短脉冲激光制孔时工艺参数的选择提供理论指导及实验依据。