MICROFABRICATION METHOD USING ULTRASHORT PULSED LASER

摘要

PPROBLEM TO BE SOLVED: To provide a microfabrication method having a high machining speed using ultrashort pulsed laser. PSOLUTION: The microfabrication method comprises a step of roughing the surface of a solid material and a step of irradiating the solid material surface with ultrashort pulsed laser of a wavelength at a low fluence to form a periodic micro structure on that surface. In the simple method of roughing the solid material surface and irradiating it with the ultrashort pulsed laser of the wavelength at the low fluence, a high speed machining is made possible for the periodic micro structure having a size of approximately the wavelength or smaller of the laser emitted. Also, when the rough surface has grain-oriented scratches, the periodic micro structure can be controlled in the direction of the scratches. PCOPYRIGHT: (C)2006,JPO&NCIPI