METHOD AND APPARATUS FOR MICRO-FABRICATION USING ULTRA-SHORT PULSE LASER

摘要

PPROBLEM TO BE SOLVED: To provide a method for micro-fabrication by a novel mechanism using femto-second laser. PSOLUTION: A second glass plate 301 is overlapped on a first glass plate 302. The overlapped glass plates are scanned by the ultra-short pulse laser from the upper surface of the second glass plate 301. In this case, standing waves of the laser are produced at positions (1), (3) in the clearance between the first glass plate 302 and the second glass plate 301, and the upper surface of the glass plate 302 and the lower surface of the glass plate 301 are machined at the positions (1), (3). In this method, the machining is carried out at the positions where the standing waves of the laser are produced in the clearance between the glass plate 302 and the glass plate 301, in other words, at the positions where interference fringes are produced. Further, the conditions for making the micro-fabrication possible or impossible can be produced only by shifting the clearance between the two plates by a quarter of a wave length. PCOPYRIGHT: (C)2007,JPO&INPIT