实现太赫兹波高透射率的微结构超精密加工技术

摘要

为针对提高太赫兹波透射率的需求，开展基于离子注入表面改性的脆性材料微结构超精密加工技术的研究，并将其应用于太赫兹波产生用磷化镓微棱锥结构的应用中。通过蒙特卡洛模拟指导注入参数，对比脆塑转变深度验证机械加工效果，成功加工出符合应用要求的微结构。通过光学测试，该方法能够有效提高加工效率，改善加工质量，实现对脆性光学材料的一次成型加工。%Aiming at carrying out research on single-point diamond fly-cutting using ion implantation surface modification method and its application to terahertz antireflection micro-pyramid structures on GaP crystals. Monte Carlo simulation was conducted to guide the actual implantation experiments for the optimization of surface modification results. Taper cutting was used to verify the enhancement of mechanical properties of the modified material. Actual GaP micro-pyramid structures were designed, machined and tested. By testing, it can be concluded that the method can improve manufacturing efficiency and surface quality of brittle optical materials in one machining process.