实现精密激光加工应用的运动控制新挑战

摘要

Laser precision processing and cutting are popularly used in silicon wafer slicing for solar cells, cell phone screen cutting, semiconductor wafer slicing, CNC machines, and so on. High-end motion control products for laser equipment must accommodate micro-scale precision in contour cutting and adjusting released energy to cope with different materials while yielding the best possible results. These issues and current solutions are discussed here with presentations of demonstration testing.%激光精密加工及切割已被应用在如太阳能晶硅切割、手机面板切割、半导体晶圆切割，Laser CNC等精密加工上面。如何通过调整能量强度来满足不同材质上切割，而呈现出有层次感的效果，这些都是高端运动控制产品所面临的新挑战。在本文中将讨论如何克服精密激光加工时所遭遇的新挑战，以及通过实例证明的解决方案。