离子注入机剂量控制器设计

摘要

Dose controller is a very important apparatus for an implantation machine. The main functions of this dose controller is to accurately measure beam current and injection dose, control the ion beam horizontal movement in the electric field, and make the ion evenly distributed in the horizontal direction and synchronous vertical scanning movement complete ion injection of dose controlBased on these functional requirements, a high accurate and multifunctional and programmable control dose controller for implant is presented in this paper. Firstly, the theory and function of the control system are introduced. Second, the hardware architecture and the design of some functional modules, and their function realizations in this control system are described. The control system is composed of three main function modules, such as current and dose accurately measure module, Scan wave generation and control module, a position synchronized sign from vertically mechanical scanning move detect and control module. Finally, the experimental results show that the performance of the ion implanter dose controller meets the design requirements.%剂量控制器是离子注入机的核心部件，主要功能有精确测量离子注入机束流与注入剂量，控制离子束在电场中水平运动，并使离子均匀地分布在水平方向和同步垂直扫描运动完成离子注入的剂量控制。基于这些功能要求，本文提出了一种高精密、多功能和程控式的离子注入机剂量控制器。首先介绍了离子注入机剂量控制器工作原理和功能，然后，详细地阐述剂量控制器的系统构成和各功能模块设计及功能实现。此控制器按功能主要分为多通道、多级量程的高精度束流与剂量测量模块、扫描波形控制模块、垂直扫描同步信号检测与控制模块等。最后，通过实验验证了此离子注入机剂量控制器的性能达到设计要求。