How to determine the dose uniformity of the scanning ion implanter

摘要

Dose uniformity of a scanning ion implanter is determined. Base beam current is measured at the end and / or at the beginning of the complete scan across the substrate area as a whole. Is measured when it is not affected by outgassing from the substrate in which the measurement is injected, the base dose distribution map may then, the base beam current is calculated for the scanning. During the scanning itself, beam instability events are detected, the size and position in the scan event instability already the detection is measured. Deviation of the corresponding map-based pre-dose of the calculation is determined, it is subtracted from the previous already been calculated based dose distribution map, to provide the corrected distribution map. By this way subtractively to (substractively) determine the total dose uniformity, accuracy of good overall is obtainable, it is not very accurate in the measurement of the beam instability events. [Selection Figure Figure 4