类金刚石碳剥离膜的制备及其性能研究

摘要

The diamond‐like carbon (DLC) stripper foils with 5‐7 μg/cm2 in thickness were produced by using the filtered cathodic vacuum arc (FCVA ) technology . The uniformity of the DLC stripper foils was measured by the XP2U balance .The results show that the maximum inhomongeneity of the DLC stripper foils in the range ofφ100 mm is less than 10% .The structures and properties of the DLC stripper foils were also evaluated and analyzed by scanning electron microscopy (SEM ) ,atom force micros‐copy (AFM ) , tribometer and X‐ray photoelectron spectroscopy (XPS ) . The SEM , AFM images and wear test results show that the DLC stripper foils are smooth and tense ,and contain hardly droplets through the double 90° filters .T he X‐ray photoelec‐tron spectrum indicates the sp3 bonds of the DLC stripper foils exceed 70% .Irradiation lifetimes and the DLC stripper foils with 5‐7 μg/cm2 were tested and compared with the 107 Ag - ,70 Ge- ,48 Ti- ,28 Si- ,197 Au- and 127 I- ion beams at the Beijing HI‐13 Tandem Accelerator .The results indicate that the lifetime of DLC stripper foil is 2.6‐10 times than that of the carbon stripper foil .%采用磁过滤阴极真空弧（FCVA）技术制备了质量厚度为5～7μg／cm2的类金刚石碳（DLC）剥离膜。用XP2U型精密电子天平测试分析了φ100 mm范围内的DLC剥离膜均匀性，结果显示其最大不均匀性小于10％。通过扫描电子显微镜（SEM ）、原子力显微镜（AFM ）、万能摩擦磨损试验机和X光电子谱（XPS）测试分析了DLC剥离膜的表面形貌、耐磨损特性和结构，结果显示采用双90° FCVA技术沉积的DLC剥离膜表面光滑致密、耐磨，几乎没有大颗粒的污染，表征金刚石特性的 sp3键含量超过70％。在北京 HI‐13串列加速器上使用107 Ag －、70 Ge－、48 Ti－、28 Si－、197 Au－和127 I－六种典型质量的离子束对质量厚度为5～7μg／cm2的DLC剥离膜和碳剥离膜寿命进行测试比较，结果显示DLC剥离膜寿命比碳剥离膜的高2.6～10倍。