本文提出了一种激光加载下准等熵压缩实验用铝/氟化锂复合双台阶靶的加工技术.采用金刚石车削在1.5mm厚的氟化锂晶体表面加工两个10μm高度的台阶,然后利用电子束蒸发在氟化锂台阶面镀厚度为几十μm的高致密纯铝膜,再通过金刚石车削工艺将镀铝面车削成平面,最后在氟化锂晶体另一面蒸镀剩余反射率低于1%的增透膜,最终获得高质量的铝/氟化锂复合双台阶靶.采用N T 1100白光干涉仪、电子比重计、电子能谱、X射线衍射仪、扫描电镜等设备对靶参数进行测量,研究各工艺对靶参数的影响.%The fabrication technique for Al/LiF composite dual-step target used in quasi-isentropic compression experiment was described . The two 10 μm high steps were processed by diamond turning technology in the surface of the 1.5 mm LiF crystal .The high-density Al film with dozens of micron thickness was coated by electron beam evapo-ration ,and turned into a flat aluminized surface through the diamond turning process . A high-quality Al/LiF composite dual-step target was eventually completed with an evaporated antireflection film (the residual reflectivity was less than 1% ) on the other side of the LiF crystal .The target parameters were measured by NT1100 white light interferometer ,electron densimeter ,electron spectroscopy ,XRD and SEM for sensiti-vity analysis .
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