温度补偿法在流量控制和标准气稀释中的研究及应用

摘要

分析了质量流量控制器中温度变化所引起的流量变化理论值与实际值之间的关系,提出一种实用的梯度温度补偿方法,即将环境温度划分为若干梯度,针对每一梯度配置不同修正系数,有效消除环境温度变化对标准气配气仪精度的影响.实验结果表明,该方法解决了环境温度的干扰问题,保证了流量控制及标准气稀释的精度,为其它温度敏感设备提供了参考.%This paper analyzes the relationship of the flow changes of mass flow controller between the theoretical value and the actual value; put forward a kind of practical gradient temperature compensation method that it divides the environmental temperature into a number of gradients. Each gradient profiles of different correction coefficients to eliminate the effect ion of ambient temperature variation on trie standard gas generator accuracy. The experimental results show that this method solves the interference problem of environmental temperature, to ensure the precision of the flow control and the standard gas dilution, as to provide the reference for the other temperature sensitive devices.