低真空扫描电镜技术在材料研究中的应用

摘要

The paper mainly introduces some application of SEM under the Low Vacuum level condition in material field. Comparison is made by examining two series of images: One is the image under high vacuum condition; and another the image of the same specimen under the low vacuum level condition. The result showes that the image quality of porous and water containing samples by low vacuum mode is rather good, reducing charge and efficiently lower pollution and damage to some sample surface at the same time, the application of the low vacuum technique also provide a new way for observing and analyzing the micro structure of some materails.%本文介绍了低真空电镜扫描电镜技术在材料研究中的应用.对低真空扫描电镜像与同一样品的二次电子信号成像相比,给出了观察与检测的实例.结果表明:在低真空操作模式下,可以减少荷电、降低样品污染和损坏,对多孔和含水样品可以得到理想的电镜照片,为一些材料的微观形态观察提供了一种新的手段.