基于Helmholtz的低感抗电子束偏转扫描线圈仿真

摘要

为了提高电子束偏转扫描频率和磁场均匀性,采用Helmholtz空心线圈结构设计了一种低感抗电子枪偏转扫描线圈.采用ANSYS有限元分析软件对偏转扫描线圈的电磁场分布进行仿真,并采用高斯计对线圈内部的电磁场进行了测量,仿真结果与实际测量值基本吻合,线圈内部的磁感应强度大小和电磁场分布的均匀性可以满足电子束高频偏转扫描的要求.实际扫描试验表明,该线圈实现了两点电子束高频偏转扫描,扫描频率可达30 kHz.%In order to improve the electron beam deflection scanning frequency and magnetic field uniformity,a low impedance deflection scanning coil for the electron beam gun is designed,employing the Helmholtz air-core coil.Adopting the finite element analysis software ANSYS workbench,the magnetic field distribution of the deflection scanning coil is simulated,and the electromagnetic field in the coil is measured by the gauss meter.It showed that the analog data is consistent with the measured data and the magnetic flux density and uniformity of the magnetic field inside the coil could satisfy the requirement of the electron beam high frequency deflection scanning.The actual scanning test showed that the coil can achieve the two-point electron beam high frequency deflection scanning,reaching a 30kHz frequency.