无机复合涂层对多孔氮化硅性能影响的研究

摘要

In this research, ceramics coating was prepared by sol-gel method. The morphology and composition of the coating were discussed by SEM , Infrared spectrum and so on, and the mechanical properties of the material were studied with 3-point bending method, Performance change was discussed before and after coating. The results show that bending strength of porosity silicon nitride has been greatly improved after coating,can reach 20% ,the porosity and water absorption have obvious decline,while the effect on dielectric properties was very small.%利用溶胶一凝胶法制备在多孔氮化硅的表面制备了无机复相陶瓷涂层，利用扫描电镜、红外光谱等手段研究了涂层的形貌和结构，并采用三点弯曲法研究了材料的力学性能，讨论了涂层前后基体的性能变化，结果表明：涂层对基体的抗弯有明显的提高，最大提高20％；用涂层封孔后后，材料的气孔率和吸水率明显下降，对多孔氮化硅介电性能影响很小。