基于严格耦合波理论的宽光谱金属介质膜光栅衍射特性分析

摘要

基于严格耦合波理论建立了金属介质膜光栅的衍射机理模型,给出了TE模式金属介质膜光栅衍射效率的表达式.以-1级衍射效率和工作带宽为评价函数,对金属介质膜光栅的表面浮雕结构进行了优化设计.对于800nm和1053nm为中心的TE波,设计的金属介质膜光栅-1级衍射效率优于97%的工作带宽分别达到130nm和150nm,最后讨论了设计的宽光谱高衍射效率金属介质膜光栅的制备工艺容差.此研究对于提高脉宽压缩光栅的性能具有重要的意义.%The rigorous coupled-wave analysis technique for describing the diffraction of metal multi-layer diffraction grating （MMDG） is built.Formulation for a stable and efficient numerical implementation of diffraction efficiency is presented for MMDG with TE polarization.With the merit function of the -1 order diffraction efficiency higher than 97% and working bandwidth,the parameters of MMDG are optimized to achieve broadband.The bandwidths used for 800 nm and 1053 nm can be 130 nm and 150 nm respectively.The manufacture latitude and the effective incident angle for the optimized structure of MMDG are discussed.The optimized grating should be useful for chirped pulse compress.