A method of fast scanning X-ray microprobe fluorescence imaging, on-the-fly scan, has been recently accomplished in BL15U1 hard X-ray micro-focus beamline of Shanghai Synchrotron Radiation Facility, based on the software platform of EPICS; the high technology of precise motion control, the X-ray flux detection and the X-ray fluorescence spectrum detection are integrated into this system. By the method of X-ray microprobe fluorescence imaging, the images of standard nickel mask and the elemental distribution of copper, zinc, kalium and iron in specimen of mouse spleen are obtained. The results demonstrate that this method not only enhances the efficiency on a large scale, but also achieves high quality fluorescence mapping.%在上海光源硬X射线微聚焦光束线站（BL15U1）上,基于EPICS软件平台,集成运动控制,光强探测,荧光探测等功能,实现了＂飞行＂模式（on-the-fly）X射线扫描微束荧光成像方法.用＂飞行＂扫描X射线荧光成像法获得了标准镍网,以及微量元素Cu,Zn,K,Fe在样品老鼠脾内的分布图像,结果显示该方法不但在速度上有了极大的提高,而且获得的元素分布图像具有高质量.
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