808nm大孔径垂直腔面发射激光器研究

摘要

For the carriers-crowded effect in vertical-cavity surface-emitting laser (VCSEL) , the injected current passes mainly through the edge of the circular active region, which results in nonuniformity of the output power density and annular facula with a poor central intensity, especially in large aperture VCSEL. How to restrain carriers-crowded effect becomes a technique problem to develop electrically pumped high power large aperture VCSEL. High power 808 nm VCSEL is demonstrated by introducing a novel structure. And an output power of 0. 3 W is achieved at 1 A at room temperature under continuous wave operation.%垂直腔面发射激光器(VCSEL)中的载流子聚集效应使注入到有源区的工作电流只是通过边缘环形区域很窄的通道,激光功率密度分布不均匀;尤其当器件尺寸较大时,激射光斑呈现环状,环中间光强很弱.这是研制电抽运高功率大尺寸VCSEL尤为突出的技术难题.采用新型结构成功研制出808 nm波段高功率大孔径VCSEL,在注入电流为1A时,室温下连续输出功率达0.3 W.