质子辐照下Mo/Si多层膜反射镜的微观结构状态

摘要

利用透射电子显微镜对质子辐照前后空间太阳望远镜Mo/Si多层膜的微观结构进行了表征,并对其辐照前后反射率的变化进行了测量.研究表明,Mo/Si多层膜经质子辐照后形成了一些缺陷结构,局部区域Mo/Si的周期性遭到破坏,Mo层与si层的宽度发生了变化,多层膜层与层之间的界面也比辐照前更为粗糙,部分层状结构由于质子辐照发生了明显的扭曲和折断等现象;此外,质子辐照导致了Mo/Si多层膜反射率的下降,这些微观缺陷的形成是光学性能降低的直接诱因.%In this paper we characterize the microstructures of Mo/si multilager in space solar telescope induced by proton irradiation by transmission electron microscope（TEM）.The optical performances of the Mo/Si multilayer mirror before and after proton irradiation are also determined.The experimental results show that some defect structures are introduced after proton irradiation.The Mo/Si periodic structure is destructed in some irradiation regions.The widths of Mo layer and Si layer significantly change and the Mo/Si interface is much rougher than before irradiation.Moreover,the obvious distortions of the Mo/Si interface and the formation of the small islands in Mo layer are also found.Furthermore,proton irradiation reduces the reflectivity of Mo/Si multilayer mirror.The dominante mechanism of optical degeneration of the Mo/Si multilayer induced by proton irradiation should be attributed to the formation of the defect structures.