针对精密光学元件表面缺陷检测效率低、大口径元件不便于检测问题,设计了一种应用于大型激光装置的大口径光学元件缺陷检测装置.通过强光手电筒、LED灯及高亮度卤素灯3种光源对40 mm×40 mm的K9样片暗场成像对比实验,得知光照强度最大的卤素灯光源检测效果最佳.研究了基于线阵CCD扫描的三维电控平移台的运动机理,确保高精度图像的采集.在此基础上,分析了图像区域定位、二值化处理、缺陷的检测等关键技术,实现了元件的高精度、实时在线检测.%Aiming at the low detection efficiency of precision optical element,large caliber precision optical element was hard to be tested, a testing device for large caliber precision optical element which applied to large laser facility was designed. Through the contrast experiment on irradiate 40 mm X 40 mm K9 sample plates with strong light flashlight, LED light,high brightness halogen lamp in dark field,the best detection efficiency can be got with the halogen lamp in which light intensity is the largest. 3D electronic transaction platform based on linear CCD scanning was studied,this can ensure the high precision image to be grabbed. On this basis, the key technologies of image regional location,binary processing, defect detection were analyzed, element detection in high precision and real time were realized.
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