钛合金表面耐冲蚀Zr(AlCu)N涂层的结构与性能

摘要

为了提高钛合金TC6的耐冲蚀性能,采用磁控溅射技术在钛合金上沉积不同Zr(A1Cu)N涂层,考察了涂层的硬度、韧性和耐冲蚀性能,采用场发射扫描电镜(FESEM),X射线衍射(XRD)和X射线光电子能谱(XPS)分析其微观结构.结果发现:向ZrN涂层中加入20at％Cu后(Zr0.8Cu0.2N),显著提高了涂层的韧性,而硬度并未明显变化,冲蚀实验表现出塑性材料的冲蚀特征；加入23at％Al后(Zr0.77Al0.23N),涂层的硬度和韧性显著提高,表现出脆性材料的冲蚀特征；同时加入19at％Al和2at％Cu时,涂层硬度最高(41.7GPa),韧性最好,耐冲蚀性能最好.结果表明,通过添加合金元素,可显著改善磁控溅射钛合金表面耐冲蚀防护涂层性能.%Different Zr ( AlCu ) N coatings are deposited onto titanium alloy TC6 substrates by reactive magnetron sputtering in order to improve the erosion resistance. The morphology and microstructure are studied by using field emission scanning electron microscopy ( FSEM) , X-ray diffraction( XRD ) and X-ray photoelectron spectroscopy ( XPS). The coatings hardness and toughness are measured by using nano-in-dentation method and Vickers indentation method, respectively. The erosion rates are measured and the characteristic damage features are identified. The results show that ZrN coating alloyed with Al and Cu can improve the erosion resistance of TC6 effectively. ZrCuN with 20at% Cu can increase the coating toughness by 2 times, whereas because of low hardness, the erosion resistance of ZrCuN can not be improved effectively. ZrAIN with 23at% Al has higher hardness and better toughness, resulting in better e-rosion resistance than ZrCuN, ZrAIN coating shows brittle erosion feature in erosion test. ZrAlCuN coating with 19at% Al and 2at% Cu has the highest hardness and best toughness, and shows the best erosion resistant performance.