Research progress on ultra-precision machining technologies for soft-brittle crystal materials

摘要

Soft-brittle crystal materials are widely used in many fields,especially optics and microelectronics.However,these materials are difficult to machine through traditional machining methods because of their brittle,soft,and anisotropic nature.In this article,the characteristics and machining difficulties of soft-brittle and crystals are presented.Moreover,the latest research progress of novel machining technologies and their applications for softbrittle crystals are introduced by using some representative materials (e.g.,potassium dihydrogen phosphate (KDP),cadmium zinc telluride (CZT)) as examples.This article reviews the research progress of soft-brittle crystals processing.