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Pressure -enhanced crystallization kinetics of amorphous silicon and germanium.

机译:非晶硅和锗的压力增强结晶动力学。

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摘要

We have measured the effects of hydrostatic pressure on the solid phase epitaxial growth (SPEG) rates of intrinsic Ge(100) and undoped and doped Si(100) into their respective self-implanted amorphous phases. Samples are annealed in a high-temperature, high-pressure diamond anvil cell. Fluid argon is used as the pressure transmission medium which ensures a clean and perfectly hydrostatic environment around the sample, and the external heating geometry employed in the cell provides a uniform temperature across the sample. The SPE growth rates are determined by in situ time-resolved visible (for Si) or infrared (for Ge) interferometry. We found that pressure enhances the growth process in both Si and Ge. For Ge, an activation volume of -6.3
机译:我们已经测量了静水压对固相Ge(100)固相外延生长(SPEG)速率以及未掺杂和掺杂的Si(100)进入各自的自植入非晶相的影响。样品在高温高压金刚石砧盒中退火。液态氩气用作压力传递介质,可确保样品周围保持清洁和理想的静水环境,池中采用的外部加热几何形状可在整个样品中提供均匀的温度。 SPE的生长速率由原位时间分辨可见光(对于Si)或红外(对于Ge)干涉仪确定。我们发现,压力促进了Si和Ge的生长过程。对于锗,激活量为-6.3

著录项

  • 作者

    Lu, Guo-Quan.;

  • 作者单位

    Harvard University.;

  • 授予单位 Harvard University.;
  • 学科 Engineering Materials Science.;Engineering Electronics and Electrical.;Physics Condensed Matter.
  • 学位 Ph.D.
  • 年度 1990
  • 页码 187 p.
  • 总页数 187
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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