Design and characterization of MEMS micromirror devices.

摘要

This thesis explores the design, implementation and characterization of MEMS micromirror devices for use in optical systems. Possible applications for these devices include areas such as adaptive optics, beam scanning, and optical switches. The devices were fabricated using a commercial MEMS foundry process, known as the Multi-User MEMS Processes (MUMPs) foundry service; the resulting prototypes were characterized using a phase-shifting Mirau interferometer, assembled specifically for this work. From these results, it was shown that the MUMPs process can be used to create satisfactory designs for rotational micromirrors with tilt angles in the range of 0--23 mrad and control voltages in the range of 0--30 V In addition, the behaviour of these mirrors were shown to fall within 5% of the predicted values calculated by the theoretical models for the devices.