There are many challenges to overcome in order to realize the fabrication of 3D autonomous micro devices. This work focused on developing novel technologies for 3D micro movable structures that overcome the limit of IC processes, which have been used for micromachining, and study of nanofabrication. Therefore, a FIB equipped with a GIS and fitted with a nano manipulator was utilized for the fabrication of 3D micro structures, assembly of movable structures and the development of functional devices such as a micro car and a micro motor. Fabrication and assembly methods with nanometer scale precision were developed using the FIB and nano manipulation systems. The fold-up technique applied to making and assembling vertical micro/nano components was evaluated. Fabrication and assembly processes were utilized to create a 3D movable, micro formula-one-like car, 20 mum long and with a minimum feature size of 400 nm. Another micro car with a permanent magnet-frame 15mum long, 5 mum wide and 5mum thick was driven by an external magnetic field. In addition, a novel stand-alone 3D autonomous micro motor was fabricated using a novel design and electrostatic charge induction mechanism with a 10V drive voltage. To the author's knowledge, this rotational motor, 15.85mum in outer diameter of the rotor, is the smallest one made by nano fabrication and nano assembly technology. The technology is potentially applicable in 3D NEMS and nano biology structures such as nano robotics.
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