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Materials science in pre-plated leadframes for electronic packages.

机译:电子封装的预镀引线框架中的材料科学。

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摘要

Au/Pd/Ni pre-plated leadframes (PPF) are high performance frames for accommodating high-end electronic packages. Cost and reliability are major concerns in their wide application. The present work, from a materials science point view, deepens the understanding of PPFs, optimizes the conventional PPFs, develops a novel PPF architecture and models the residual stress relaxation in heteroepitaxial thin films.; The wire pull test, the solderability test, and High-Resolution Transmission Electron Microscopy (HRTEM) were employed to characterize the PPFs in order to understand the relationship between performance and microstructure. We optimized the electroplating profiles and determined the minimum thickness of the Pd layer with the PPF performance satisfying the industry standards. Further increasing the Pd layer thickness beyond the critical thickness will not enhance the performance more, but increase the product cost. With the optimized electroplating profile, the electroplated Au layer is epitaxially deposited on the Pd layer, and so does the Pd layer on the Ni layer. Misfit dislocations and nanotwins are present at the interface between the Pd and Ni layers, which are generated to release the about 10.4% misfit strain between the Pd and Ni lattices. This work demonstrates that the electro-deposition technique can electroplate epitaxy-like Pd films on the highly (200) textured Ni films, which are grown on the Cu substrates.; A novel technique for impeding Cu out-diffusion in Cu alloy based pre-plated leadframes was developed by electroplating a 3-4 nm thick Sn layer on a Cu alloy base prior to electroplating a Ni layer. A 10-14 nm thick epitaxy-like and dense (Cu,Ni)3Sn intermetallic compound (IMC) layer is automatically formed en route of diffuse reaction, which leads to a drastic reduction in Cu out-diffusion and hence improves significantly the protection of the leadframes against oxidation and corrosion attack. The oxidation behaviours were quantified by Electron Diffraction X-ray (EX) incorporated in Scanning Electron Microscopy (SEM) in the present work, which is a good complementary to the traditional weight gain test by a balance. A diffusion/oxidation model was developed to estimate the effective diffusion coefficient of Cu in the formed IMC nanolayers. The estimated Cu diffusion coefficient in the IMC interlayer is about 1.6x10 -22m2/s at 250°C, which is around 7~11 orders lower than the interdiffusion coefficients for eta- Cu6Sn5 and epsilon- Cu3Sn phases at corresponding temperatures.; Based on the dislocation theory of twinning, analytical solutions by using the hybrid superposition and Fourier transformation approach were derived for the calculation of various energies involved in the misfit twinning process. For a given epilayer thickness and lattice mismatch strain, the twin formation energy should reach its minimum to determine the twin width and a zero minimum formation energy determines the critical thickness for misfit twinning. The effect of elastic mismatch between the epilayer and the substrate on the critical thickness was studied comprehensively, revealing that an elastically soft epilayer has a large critical thickness. Moreover, a misfit-twin-and-perfect-dislocation predominance chart is constructed to predict the predominant regions of misfit twinning and perfect dislocation in the mismatch strain and the specific twin boundary energy domain. Multiple misfit twins in epilayer/substrate systems were studied by summing up the stress and displacement fields of individual twins. In principle, the energy minimization approach can be applied to multiple misfit twins, although only periodic arrays of parallel and alternating twins were investigated here in detail. The equilibrium twin width and equilibrium twin spacing of a periodic array of twins represent the misfit twin morphology. The theoretical results indicate that the difference in elastic constants between an epilayer and its substrate has gre
机译:Au / Pd / Ni预镀引线框架(PPF)是高性能框架,用于容纳高端电子封装。成本和可靠性是其广泛应用的主要关注点。从材料科学的角度来看,当前的工作加深了对PPF的理解,优化了常规PPF,开发了新颖的PPF体系结构,并建模了异质外延薄膜中的残余应力松弛。为了了解性能和微观结构之间的关系,采用了拉线测试,可焊性测试和高分辨率透射电子显微镜(HRTEM)来表征PPF。我们优化了电镀轮廓,并确定了Pd层的最小厚度,且PPF性能满足了行业标准。将Pd层厚度进一步增加到超过临界厚度将不会进一步提高性能,但是会增加产品成本。利用优化的电镀轮廓,电镀的Au层外延沉积在Pd层上,Ni层上的Pd层也是如此。在Pd和Ni层之间的界面处存在错配位错和纳米孪晶,其产生是为了释放Pd和Ni晶格之间约10.4%的失配应变。这项工作表明,电沉积技术可以在生长在Cu衬底上的高度(200)织构化的Ni膜上电镀类似外延的Pd膜。通过在电镀镍层之前在铜合金基底上电镀3-4 nm厚的锡层,开发了一种阻止铜在基于铜合金的预镀引线框架中扩散的新技术。在扩散反应过程中会自动形成10-14 nm厚的外延样致密的(Cu,Ni)3Sn金属间化合物(IMC)层,从而大大减少了Cu的向外扩散,从而显着改善了对Cu的保护作用。引线框抗氧化和腐蚀。在本工作中,通过结合在扫描电子显微镜(SEM)中的电子衍射X射线(EX)对氧化行为进行了定量,通过天平可以很好地补充传统的增重测试。建立了扩散/氧化模型以估计形成的IMC纳米层中Cu的有效扩散系数。在250°C下,IMC夹层中的Cu扩散系数约为1.6x10 -22m2 / s,比相应温度下eta-Cu6Sn5和ε-Cu3Sn相的扩散系数低7〜11个数量级。基于孪生位错理论,推导了混合叠加和傅里叶变换方法的解析解,用于计算错配孪生过程中涉及的各种能量。对于给定的外延层厚度和晶格失配应变,孪晶形成能应达到其最小值以确定孪晶宽度,而最小形成能为零则决定失配孪晶的临界厚度。全面研究了外延层和基底之间的弹性失配对临界厚度的影响,表明弹性软外延层具有较大的临界厚度。此外,构建了错配双胞胎和完美位错优势图,以预测错配应变和特定孪晶边界能域中错配孪生和完美位错的主要区域。通过总结单个孪生子的应力和位移场,研究了外延层/基底系统中的多个失配孪生子。原则上,能量最小化方法可以应用于多个失配的孪生子,尽管这里仅详细研究了平行和交替孪生子的周期性阵列。双胞胎的周期性阵列的平衡双胞胎宽度和平衡双胞胎间距表示失配双胞胎形态。理论结果表明,外延层与其基底之间的弹性常数之差为

著录项

  • 作者

    Liu, Lilin.;

  • 作者单位

    Hong Kong University of Science and Technology (People's Republic of China).;

  • 授予单位 Hong Kong University of Science and Technology (People's Republic of China).;
  • 学科 Engineering Packaging.; Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2006
  • 页码 187 p.
  • 总页数 187
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 包装工程;工程材料学;
  • 关键词

  • 入库时间 2022-08-17 11:39:44

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