Diagnostics of N2 and O2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

著录项

• 来源
  《XXVIII international conference on phenomena in ionized gases : Book of abstracts》|2007年|1|共1页
• 会议地点 Prague(CZ);Prague(CZ)
• 作者

  T. Nakano; T. Kitajima; S. Samukawa; T. Makabe;

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• 作者单位

  Department of Electrical and Electronic Engineering, National Defense Academy, Kanagawa, Japan;

  rnDepartment of Electrical and Electronic Engineering, National Defense Academy, Kanagawa, Japan;

  rnInstitute of Fluid Science, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai, Miyagi, 980-8577, Japan;

  rnDepartment of Electronics and Electrical Engineering, Keio Un., Yokohama, Kanagawa, 223-8522, Japan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词