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Nitride-based high-power devices: transport properties, linear defects, and goals

机译:基于氮化物的高功率器件:传输特性,线性缺陷和目标

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The wide bandgap semiconductors GaN and AlGaN show promise for high voltage stand-off layers in high power devices such as GaN Schottky rectifiers and GaN/AlGaN thyristor-like switches. The material properties which significatnly influence the device design and performance are electron and hole diffusion lengths, recombination lifetimes and the critical field for electric breakdown. We have fabricated high standoff voltage (>450 V) GaN Schottky rectifiers, and meausred a lower limit for the critical field for electric breakdown to be (2+-0.5) centre dot 10~6V/cm. Diffusion lengths and recombination lifetimes were measured by electron beam induced current on unintentionally doped, n and p-type GaN samples grown by various epitaxial techniques. To establish the possible efects of linear dislocations and other defects on the transport and breakdown properties, the same sample surfaces were analyzed by AFM. On some of the samples, our measurements indicate that the dislocations appear to be electrically active and that recombination at dislocations occupying grain boundaries limit the minority carrier lifetime to the nanosecond range. Based on the measurements of transport properties, critical fields and the modeling of the devices proposed, our estimates indicate that DARPA/EPRI goals for megawatt electronics set at 5kV standoff voltage and 200A on-state current might be achieved with 15-20 #mu#m thick layers grown by HVPE, at approximately 1 centre dot 10~(16)cm~(-3) doping levels, and 1-2 cm~2 device active area.
机译:宽带隙半导体GaN和AlGaN有望在GaN肖特基整流器和GaN / AlGaN晶闸管状开关等高功率器件中实现高压隔离层。显着影响器件设计和性能的材料特性是电子和空穴的扩散长度,复合寿命和电击穿的临界场。我们制造了高隔离电压(> 450 V)的GaN肖特基整流器,并将电击穿的临界场的下限限制为(2 + -0.5)中心点10〜6V / cm。通过电子束感应电流在通过各种外延技术生长的无意掺杂的n型和p型GaN样品上测量扩散长度和复合寿命。为了确定线性位错和其他缺陷对传输和击穿性能的可能影响,使用AFM分析了相同的样品表面。在一些样品上,我们的测量表明,位错似乎是电活性的,并且在占据晶界的位错处的重组将少数载流子的寿命限制在纳秒范围内。根据传输特性,关键场和拟议器件的模型测量,我们的估计表明,使用15-20#mu#可以实现MW设置为5kV隔离电压和200A通态电流的兆瓦级电子产品的DARPA / EPRI目标。通过HVPE生长m厚的层,在大约1个中心点10〜(16)cm〜(-3)掺杂水平,以及1-2 cm〜2器件有效面积。

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