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Studies of prototype DEPFET sensors for the Wide Field Imager of Athena

机译:用于雅典娜广域成像仪的DEPFET原型传感器的研究

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The Wide Field Imager (WFI) of ESA's next X-ray observatory Athena will combine a high count rate capability with a large field of view, both with a state-of-the-art spectroscopic performance. To meet these demands, specific DEPFET active pixel detectors have been developed and operated. Due to the intrinsic amplification of detected signals they are best suited to achieve a high speed and low noise performance. In the course of the development of the DEPFET sensors, different fabrication technologies and transistor geometries have been implemented on a dedicated prototype production. The main modifications between the sensors concern the shape of the transistor gate - regarding the layout - and the thickness of the gate oxide - regarding the technology. To facilitate the fabrication and testing of a large variety of sensors the presented studies were carried out with 64×64 pixel detectors. The detector comprises a control ASIC (Switcher-A), a readout ASIC (VERITAS-2) and the sensor. In this paper we give an overview on the evaluation of different prototype sensors. The most important results, which have been decisive for the identification of the optimal fabrication technology and transistor layout for subsequent sensor productions are summarized. It will be shown that the developments result in an excellent performance of spectroscopic X-ray DEPFETs with typical noise values below 2.5 ENC at 2.5 μs/row
机译:ESA的下一个X射线天文台雅典娜的宽视场成像仪(WFI)将结合高计数率功能和大视野,同时具有最先进的光谱性能。为了满足这些需求,已经开发并运行了特定的DEPFET有源像素检测器。由于所检测信号的固有放大,它们最适合于实现高速和低噪声性能。在DEPFET传感器的开发过程中,已在专用的原型产品上实施了不同的制造技术和晶体管几何形状。传感器之间的主要修改涉及晶体管栅极的形状-关于布局-和栅极氧化物的厚度-关于技术。为了方便各种传感器的制造和测试,本文采用64×64像素检测器进行了研究。检测器包括控制ASIC(Switcher-A),读出ASIC(VERITAS-2)和传感器。在本文中,我们对不同原型传感器的评估进行了概述。总结了最重要的结果,这些结果对于确定最佳制造技术和后续传感器生产的晶体管布局具有决定性意义。可以证明,这种发展使X射线DEPFET光谱仪具有出色的性能,在2.5μs/行的典型噪声值低于2.5 ENC的情况下

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