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Studies of prototype DEPFET sensors for the Wide Field Imager of Athena

机译:雅典娜宽野成像仪的原型DEPFET传感器研究

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The Wide Field Imager (WFI) of ESA's next X-ray observatory Athena will combine a high count rate capability with a large field of view, both with state-of-the-art spectroscopic performance. To meet these demands, specific DEPFET active pixel detectors have been developed and operated. Due to the intrinsic amplification of detected signals they are best suited to achieve a high speed and low noise performance. Different fabrication technologies and transistor geometries have been implemented on a dedicated prototype production in the course of the development of the DEPFET sensors. The main modifications between the sensors concern the shape of the transistor gate - regarding the layout - and the thickness of the gate oxide - regarding the technology. To facilitate the fabrication and testing of the resulting variety of sensors the presented studies were carried out with 64×64 pixel detectors. The detector comprises a control ASIC (Switcher-A), a readout ASIC (VERITAS- 2) and the sensor. In this paper we give an overview on the evaluation of different prototype sensors. The most important results, which have been decisive for the identification of the optimal fabrication technology and transistor layout for subsequent sensor productions are summarized. It will be shown that the developments result in an excellent performance of spectroscopic X-ray DEPFETs with typical noise values below 2.5 ENC at 2.5 μs/row.
机译:ESA的下一个X射线天文台雅典娜的广泛领域成像器(WFI)将使高计数率能力与大型视野相结合,包括最先进的光谱性能。为了满足这些要求,已经开发并操作了特定的DEPFET活性像素探测器。由于检测到信号的内在放大器,它们最适合实现高速和低噪声性能。在DEPFET传感器的开发过程中,在专用的原型制作中已经实现了不同的制造技术和晶体管几何形状。传感器之间的主要修改涉及晶体管栅极的形状 - 关于布局 - 关于技术的栅极氧化物的厚度。为了便于制造和测试所得到的各种传感器,用64×64像素检测器进行所提出的研究。检测器包括控制ASIC(切换器-A),读出ASIC(Veritas-2)和传感器。在本文中,我们概述了对不同原型传感器的评估。总结了用于识别最佳制造技术和晶体管布局的最重要的结果,总结了用于随后的传感器制造的最佳制造技术和晶体管布局。将表明,该开发导致光谱X射线DEPFET的优异性能,具有低于2.5英寸的典型噪声值,在2.5μs/行下。

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