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Effects of Tolerance Fabrication of Extended Interaction Oscillator Based on Pseudospark-sourced Sheet Electron Beam at 0.35 THz

机译:基于伪火花源片状电子束在0.35 THz时扩展互作用振荡器的容差制作效果

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摘要

S/m to take into account the skin depth and surface roughness. The method of Wire Electrical Discharge Machining (WEDM) is proposed to manufacture the 0.35 THz EIO because of its precision and moderate cost compared with other manufacturing methods such as high speed micro machining, Deep Reactive Ion Etching (DRIE) or Ultra Violet Lithographie, Galvanik, and Abformung (UV LIGA).
机译:S / m要考虑到表皮深度和表面粗糙度。与其他制造方法(例如高速微加工,深反应离子蚀刻(DRIE)或紫外光刻法,Galvanik)相比,其精度高,成本适中,因此提出了采用电火花线切割加工(WEDM)的方法来制造0.35 THz EIO。和Abformung(UV LIGA)。

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