ENERATING METHOD OF MICRO GROOVES BY MICRO EDM

摘要

A new method to fabricate micro patterns for micro chips used in micro TAS is proposed. Results obtained this study are summarized as follows;rn1) It is confirmed that micro groves for micro TAS can be easily generated by the combination of micro EDM and etching.rn2) Rotating the electrode, continuous long discharged marks can be obtained stably.rn3) Decreasing run-out of electrode, stable EDM can be carried out and then long micro grooves can be generated.