A NOVEL MICROFABRICATION TECHNIQUE FOR THREE-DIMENSIONAL METAL STRUCTURES BY PHOTOCATALYSIS

摘要

Though there are a variety of microfabrication techniques, one that can fabricate three-dimensional metal structure by simple procedure is rarely seen. Given this fact, we suggest a new method for three-dimensional microfabrication that is characterized by photocatalytic deposition. The setup for this method consists of a wavelength 405nm laser diode, a numerical aperture 0.9 objective lens, and a motorized linear stage. With this setup, it was observed that a converging near-ultraviolet laser beam caused deposition of Ag at the beam waist in AgNO_3 solution including TiO_2 nanoparticles. Furthermore, we succeeded in fabricating a microbox and a microcoil by sweeping the beam waist in the solution.