Filtering Shields in Vacuum-Arc Plasma Sources

摘要

The applicability of a labyrinth system of intercepting shields for suppressing macroparticle flows in the plasma of vacuum-arc sources with a magnetic focusing was investigated. Two variants of the source acceptable for using the metal cathode and the graphite cathode are described. Being advantageously distinguished from all other similar-purpose devices by the simplicity in the design, the plasma sources with the filtering shields under study are approximately equivalent in their capacity and in the coating roughness to the filter with the "magnetic isle", and also to the pulsed source with laser ignition.