METHOD OF CONTROL BY TRAJECTORY OF MOTION OF THE CATHODE SPOT OF THE VACUUM-ARC SOURCE OF PLASMA AND DEVICE FOR VACUUM-ARC SOURCE FOR PLASMA

摘要

1. A method for controlling the trajectory of the motion of the cathode spot vacuum arc plasma source using a magnetic system consisting of a magnetic core and two coils with currents in opposite directions, the implementation of which a change in the ratio of currents in the coils is controlled curvature of the magnetic field lines, which provides for controlled change of the radius trajectory the cathode spot of the vacuum dugi.2. Apparatus vacuum arc plasma source, characterized in that it comprises a cathode, an anode ignition device and a magnetic system consisting of a magnetic core and two coils disposed coaxially to the cathode, wherein the electric current in the coils is in the opposite napravlenie.3. The apparatus according to claim 2, characterized in that the device is used as an anode case or cathode installed coaxially additional elektrod.4. Device according pp.2-3, characterized in that the ignition device is made of ceramic and the ignition electrode vtulki.5. Device according pp.2-3, characterized in that the cathode is provided with a coaxially installed electrically isolated from cathode and anode neutral insert.