首页> 外文会议>Two- and Three-Dimensional Methods for Inspection and Metrology IV; Proceedings of SPIE-The International Society for Optical Engineering; vol.6382 >Towards on-line non-contact roughness profile measurements with a sensor based on Conoscopic holography: current developments
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Towards on-line non-contact roughness profile measurements with a sensor based on Conoscopic holography: current developments

机译:使用基于圆锥全息术的传感器进行在线非接触式粗糙度轮廓测量:最新进展

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摘要

On-line non-contact roughness metrology is still an open problem. Usual methods involve either contact (stylus-type devices) or perform indirect evaluations of some roughness parameters, such as R_a, with light scattering techniques or speckle measurement (among the most common optical techniques), inductance (only for magnetic materials) or ultrasound methods. However, a generic method able to obtain every roughness parameter (what means recording the real distance profile), able to work with a variety of surface types, and able to be installed in production lines is still to be developed. In this article, the ongoing work towards the construction of a non-contact optical profile measuring sensor that could be used for roughness measurements is presented. Our approach is based on Conoscopic holography, a common-path interferometric technique which is a good candidate for industrial applications. Current research effort is focused in enhancing accuracy in these systems, by both reducing the coherence of the illuminating source (laser) and changing the hardware and software setup, with the aim of building a sensor able to capture a profile of an object's surface in a single shot with high precision from a relatively long standoff (several cm).
机译:在线非接触粗糙度测量仍然是一个未解决的问题。通常的方法包括接触(手写笔型设备)或通过光散射技术或斑点测量(在最常见的光学技术中),电感(仅用于磁性材料)或超声方法对某些粗糙度参数(例如R_a)进行间接评估。但是,仍在开发一种通用的方法,该方法可以获取每个粗糙度参数(意味着记录实际距离轮廓),可以在各种表面类型上工作并且可以安装在生产线中。在本文中,介绍了正在进行的可用于粗糙度测量的非接触式光学轮廓测量传感器的构造工作。我们的方法基于锥光全息术,这是一种共径干涉技术,非常适合工业应用。当前的研究工作集中在通过减少照明源(激光)的相干性以及更改硬件和软件设置来提高这些系统的准确性,目的是建立一个能够捕获物体表面轮廓的传感器。相对较长的距离(几厘米)可以进行高精度的单发拍摄。

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