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Thermal conversions of some Ba, Sr, Ti oxide precursors for CVD

机译:某些Ba,Sr,Ti氧化物前驱体用于CVD的热转化

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Gas phase composition and conversions under evaporation and thermal decomposition of Sr(dpm)_2, Ba(dpm)_2, TiO(dpm)_2 and Ti(OPr~i)_2(dpm)_2 (dpm=C(CH_3)_3COCHCOC(CH_3)_3, Pr~i = CH(CH_3)_2) which are conventional CVD precursors for BST films have been studied by means of original mass spectrometric technique. Properties and thermal behaviour of these compounds have been compared with respect to CVD precursor. It has been shown that conversions leading to binuclear species formation occur under transportation of TiO(dpm)_2 into deposition zone. It has been reported alike decomposition mechanism of Sr and Ba precursors. Influence of oxygen on thermal stability and products of decomposition of the source compound has been shown.
机译:Sr(dpm)_2,Ba(dpm)_2,TiO(dpm)_2和Ti(OPr〜i)_2(dpm)_2(dpm = C(CH_3)_3COCHCOC(CH_3) )_3,Pr〜i = CH(CH_3)_2),这是用于BST膜的常规CVD前体,已经通过原始质谱技术进行了研究。这些化合物的性质和热行为已相对于CVD前体进行了比较。研究表明,在TiO(dpm)_2进入沉积区的运输过程中发生了导致双核物种形成的转化。已经报道了类似的Sr和Ba前体的分解机理。已经显示了氧对热稳定性和源化合物分解产物的影响。

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