Volatility studies on single source precursors for LaNiO_3 film deposition: Mass spectrometry and thermal analysis

摘要

Four volatile heterobimetallic complexes [Ni(Q)La(dik)_3] [H_2Q = condensation product of 1,2-diaminoethane with salicylic aldehyde or pentane-2,4-dione, Hdik = 1,1,1,5,5,5-hexafluoro-pentane-2,4-dione, 1,1,1-trifluoro-5,5,-dimethylhexane-2,4-dione] were selected as prospective single source precursors for LaNiO, film deposition. Thermal analysis under vacuum, isothermal vacuum sublimation and mass spectrometry were used for comparatively characterizing volatility and thermal stability of the heterobimetallic complexes. The problem of intact sublimation of [Ni(Q)La(dik)_3] is discussed in correlation with the nature of the ligands ― Q~(2-) and dik~- ╚D and solid state features of the complexes.