Gold nanowires and nanodots in carbon nanotube-capsules formed by one-dimensional Self-organization of gold nanoparticles

摘要

Recent speed-up of ultra-large scale integrated circuits (ULSI) of semiconductor devices is based on the minimization of the design rule. New properties are also expected by formation of low dimensional array of quantum dots, and carbon nanocage structures are one of the candidates [1-5]. The photolithography technique is used for the formation of these nanostructures, and the ULSI with 0.07 #mu# m rule will be produed in 2009. However, limit of the design rule is reported to be 0.05 #mu# m ( chemical bounds 50 nm) by using extreme ultraviolet lithography. It is believed that establishment of nanostructure-formation technique by self-organization of nanoparticles is worth in order to overcome the lithography limit. Spontaneous formation of well-organized nanostructures is intriguing for both scientific research and future electronicdevice application. However, dimensionality of the self-organization has been two and three [6-8], and one-dimensional self-organization has been needed for the formation of "nanowiring" for the future ULSI devices.