Low Loss Microwave Coplanar Waveguides Realized On Low-resistivity Silicon Wafer

摘要

A low-loss microwave Coplanar Waveguides (CPW) was fabricated on Porous Silicon (PS) substrate oxidated and coated with polyimide. The high frequency performance of PS/Oxidated PS (OPS) was observed through fabrication and measurement of CPW on N/P-type PS. The CPW loss was lowered to 0-7.5dB/1.2cm in 0-40GHZ in comparison with quartz and poly-Si/SiO_2/high -resistivity Si, and some conclusions were drawn out.