Optical Properties of Al_2O_3 and MgF_2 Coatings Deposited by Electron-beam Evaporation in the DUV/VUV Spectral Range

摘要

Single layers of Al_2O_3 and MgF_2 were deposited upon super polished fused-silica by electron-beam evaporation and were characterized. The subsequent optical constants n and k were reported for the spectral range of 180nm-230nm. And HR coatings for 193nm were designed on the basis of the evaluated optical constants and produced. Transmittance and reflectance of HR coatings were compared to the theoretical calculations on the basis of the evaluated optical constants of the single layers.