首页> 外文会议>Symposium on Thin-Films - Stresses and Mechanical properties Vii, held December 1-5, 1997, Boston, Massachusetts, U.S.A. >Mechanical characteriszation of ultrathin, hard-disk overcoats using scratch testing and depth-sensing indentation
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Mechanical characteriszation of ultrathin, hard-disk overcoats using scratch testing and depth-sensing indentation

机译:使用划痕测试和深度感应压痕对超薄硬盘外涂层进行机械表征

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摘要

Two series of five diamond-like carbon (DLC) coatings were sputtered under nominally identical conditions, but to different film thicknesses of 20 nm and 105 nm. First, the hardness of each sample was determined by depth-sensing indentation. Hardness measurements were substrate-affected to some extent for all samples but especially so for the 20 nm coatings. Two types of scratch tests were performed in an attempt to isolate and characterize the top coatings. The first was a wear test, which consisted of moving the sample back and forth repeatedly under a small constant load. The residual damage was inconsistent, but appeared to be a function of the composite, or substrate-affected hardness. The second test was a single-pass scratch in which the normal load was rampled linearly. For all samples, the friction coefficient was approximately constant as a function of load. Furthermore, samples with the same top coats yielded similar friction coefficients, regardless of the coating thicknesses. Friction coefficient decreased with hydrogen content and to some extent, increased with hardness, as measured on the 105 nm samples. The friction coeffcient measured during a ramp-load scratch offers an alternative for characterizing ultra-thin films, then identation alone yields measurements that are significantly affected by the substrate.
机译:在名义上相同的条件下溅射了两个系列的五个类金刚石碳(DLC)涂层,但是膜厚分别为20 nm和105 nm。首先,通过深度感应压痕确定每个样品的硬度。对于所有样品,硬度测量在一定程度上受基材影响,但对于20 nm涂层尤其如此。进行了两种类型的划痕测试,以试图隔离和表征表面涂层。第一个是磨损测试,包括在较小的恒定载荷下反复往复移动样品。残余损伤并不一致,但似乎是复合材料或受基材影响的硬度的函数。第二项测试是单次通过刮擦,其中正常负载线性增加。对于所有样品,摩擦系数作为载荷的函数近似恒定。此外,无论涂层厚度如何,具有相同面漆的样品产生的摩擦系数都相似。在105 nm样品上测得,摩擦系数随氢含量而降低,并随硬度的增加而有所提高。在斜坡载荷刮擦过程中测得的摩擦系数为表征超薄薄膜提供了另一种选择,然后仅通过识别即可获得受基材显着影响的测量结果。

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