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Mechanical characteriszation of ultrathin, hard-disk overcoats using scratch testing and depth-sensing indentation

机译:使用划痕测试和深度传感缩进的超薄,硬盘外涂层的机械表现

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Two series of five diamond-like carbon (DLC) coatings were sputtered under nominally identical conditions, but to different film thicknesses of 20 nm and 105 nm. First, the hardness of each sample was determined by depth-sensing indentation. Hardness measurements were substrate-affected to some extent for all samples but especially so for the 20 nm coatings. Two types of scratch tests were performed in an attempt to isolate and characterize the top coatings. The first was a wear test, which consisted of moving the sample back and forth repeatedly under a small constant load. The residual damage was inconsistent, but appeared to be a function of the composite, or substrate-affected hardness. The second test was a single-pass scratch in which the normal load was rampled linearly. For all samples, the friction coefficient was approximately constant as a function of load. Furthermore, samples with the same top coats yielded similar friction coefficients, regardless of the coating thicknesses. Friction coefficient decreased with hydrogen content and to some extent, increased with hardness, as measured on the 105 nm samples. The friction coeffcient measured during a ramp-load scratch offers an alternative for characterizing ultra-thin films, then identation alone yields measurements that are significantly affected by the substrate.
机译:在标称相同的条件下溅射两种五种菱形碳(DLC)涂层,但不同膜厚度为20nm和105nm。首先,通过深度感测压痕来确定每个样品的硬度。硬度测量在一定程度上对所有样品进行底物,但特别是对于20nm涂层。尝试分离和表征顶部涂层的两种类型的划痕测试。首先是磨损试验,其包括在小恒定载荷下反复来回移动样品。残余损伤是不一致的,但似乎是复合材料的函数,或影响底物的硬度。第二种测试是单通划痕,其中正常负载是线性的。对于所有样品,摩擦系数与负载的函数近似恒定。此外,无论涂层厚度如何,具有相同顶部涂层的样品也产生了类似的摩擦系数。如在105nm样品上测量的,摩擦系数随氢含量和一定程度的增加而增加。在斜面载荷划痕期间测量的摩擦系数提供了表征超薄膜的替代方案,然后单独的标识产生由基板显着影响的测量。

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