A 2-D axisymmetric finite element analysis has been performed on a vertical MOCVD reactor having a close-spaced water-cooled injector for which the gas is injected only 1.6 cm above the rotating disk. The analysis showed that the system has a much higher flow stability, in terms of suppression of unwanted thermally driven converction, than conventional reactors. In addition, the flow study has identified two kinds of flow recirculation, a purely thermally driven convection and a geometry assisted one. The former is initiated with gas flowing upward near the center of the disk circulating clockwise, the latter one is located near the chamber wall circulating counterlockwise. This result is important in interpreting experiments.
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