Micro-Raman Evaluation of Polycrystalline Silicon MEMS Devices

摘要

Micro-Raman spectroscopy is a valuable tool for thermometry of operational polysilicon MEMS devices. By using the temperature-calibrated response of the optical phonon peak of the polysilicon Raman signature and the micron-scale spatial resolution achieved with a 488 nm Ar~+ laser Raman probe, we have obtained spatially resolved steady-state thermal profiles of Joule-heated thermal flexure actuators. The measured thermal profiles are further compared to one-dimensional numerical models of the thermal response of the electrically heated devices.