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Effect of Stresses in Molybdenum Back Contact Film on Properties of CIGSS Absorber Layer

机译:钼背接触膜中的应力对CIGSS吸收层性能的影响

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摘要

Analysis of CuIn_(1-x)Ga_xSe_(2-y)S_y (CIGSS) absorber and molybdenum back contact layer was carried out to understand the changes in the microstructure of CIGSS layer as a function of the deposition conditions and the nature of stress in the underlying Mo film. All the depositions were carried out on 10 cm x 10 cm glass substrates. Compressive and tensile stressed molybdenum films were prepared with combinations of deposition parameters; power and pressure. CIGSS absorber layer was prepared by depositing metallic precursors using DC magnetron sputtering followed by selenization and sulfurization. Molybdenum layer deposited at 300 W and 3x10~(-4) Torr pressure produced compressive stress with compact, well adherent and lower sheet resistance as compared to the tensile stressed film deposited at 200 W and 5 x 10~(-3) Torr. The crystallinity of the CIGSS film was found not to depend on the stress in the underlying molybdenum film. However, the adhesion at the Mo/CIGSS as well as gallium profile at the Mo/CIGSS interface were affected by the stress.
机译:对CuIn_(1-x)Ga_xSe_(2-y)S_y(CIGSS)吸收剂和钼背接触层进行了分析,以了解CIGSS层的微观结构随沉积条件和应力性质的变化。底层的钼膜。所有沉积均在10 cm x 10 cm的玻璃基板上进行。结合沉积参数制备了压应力和拉伸应力钼膜。力量和压力。通过使用直流磁控溅射沉积金属前驱物,然后进行硒化和硫化来制备CIGSS吸收层。与在200 W和5 x 10〜(-3)Torr下沉积的拉伸应力膜相比,在300 W和3x10〜(-4)Torr压力下沉积的钼层产生的压应力具有致密性,良好的附着力和较低的薄层电阻。发现CIGSS膜的结晶度不取决于下面的钼膜中的应力。但是,Mo / CIGSS处的附着力以及Mo / CIGSS界面处的镓轮廓受应力影响。

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