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SiC epitaxial growth on carbon

机译:SiC在碳上外延生长

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摘要

The possibility of single crystal SiC epitaxial growth on freestanding amorphous carbon films (500-1000 A) as well as thin amorphous carbon larers deposited on mono-crystalline SiC seeds, by conventional physical vapor transport (PVT) technique, is demonstrated. Preliminary experiments indicate that under certain specific growth conditions, 3D SiC single crystals (100-600 A) of different poltypes can be grown on freestanding amoprhous carbon layers, withmore or lese equal probability o f formation for each polytype. On the other hand, under low axial temperature gradients (<30 deg C /cm), the SiC epitaxial growth on carbon is amorphous in nature. Also, experimental results that demonstrate two-dimensional single crystal SiC epitaxial growth on an amorphous carbon film deposited on mono-crystalline 6H-SiC wafer, is presented. Experiments performed in our laboratory indicate that mono-crystalline SiC growth is possible on amorphous carbon layers upto 0.1 mu m thickness.
机译:通过常规物理气相传输(PVT)技术,证明了单晶SiC外延生长在独立的非晶碳膜(500-1000 A)上以及沉积在单晶SiC晶种上的非晶非晶碳的可能性。初步实验表明,在某些特定的生长条件下,可以在独立的无碳碳层上生长不同极型的3D SiC单晶(100-600 A),每种多型的形成概率更高或更低。另一方面,在低轴向温度梯度(<30℃/ cm)下,SiC在碳上的外延生长本质上是非晶的。此外,实验结果表明,二维单晶SiC外延生长在单晶6H-SiC晶片上沉积的非晶碳膜上。我们实验室进行的实验表明,单晶SiC可以在厚度不超过0.1μm的非晶碳层上生长。

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