首页> 外文会议>Symposium on Power Semiconductor Materials and Devices December 1-4, 1997, Boston, Massachusetts, U.S.A. >Metalization of thin graphite layers after Cs deposition oa 4H-SiC(0001) surfaces
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Metalization of thin graphite layers after Cs deposition oa 4H-SiC(0001) surfaces

机译:Cs沉积在4H-SiC(0001)表面后的薄石墨层的金属化

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The interaction of cesium atoms with graphitized 4H-SiC(0001) surfaces was investigated by use of Auger electron, ultraviolet photoemission and high-resolution electron energy-loss spectroscopy (HREELS) as well as work function measurements with a Kelvin probe. The samples were annealed at temperatures well above 1300 K resulting in a formation of about two graphite layers on top of the SiC substrates. The corresponding low-energy electron diffraction image shows a (6 3x6 3)R30 deg pattern. Cs deposition on graphitized SiC occurs in two subsequent stages. First, even small amounts of evaporated Cs lead to a spontaneous decrease in work function by 1.8 eV. The work function stays coonstant after further eevaporation corresponding to an intercalation of Cs into the graphite overalyer. In the second stage Cs atoms are adsorbed on top of the Cs-intercalated compound resulting in a futher decrease of work function. The grpahite laer is effectively metallized by Cs evaporation. This is confirmed by a Fermi edge which is observed in the photemission spectra even after the smallest dose applied. Moreover, the excitation of optical Fuchs-Kliewer phonons in SiC by HREELS is significantly quenched by the metallic overalyer and the electron energy-loss spectra exhibit features which are typical for thinhomogeneous metal layers on surfaces of heteropolar semiconductors.
机译:铯原子与石墨化的4H-SiC(0001)表面的相互作用通过俄歇电子,紫外光发射和高分辨率电子能量损失谱(HREELS)以及开尔文探针的功函数测量进行了研究。将样品在远高于1300 K的温度下进行退火,从而在SiC衬底顶部形成约两个石墨层。相应的低能电子衍射图像显示(6 3x6 3)R30度图形。在石墨化SiC上的Cs沉积在两个后续阶段发生。首先,即使少量的蒸发Cs也会导致功函自发降低1.8 eV。在进一步蒸发之后,功函数保持恒定,这对应于Cs嵌入石墨超合金中。在第二阶段,Cs原子被吸附在Cs插层化合物的顶部,导致功函进一步降低。通过Cs蒸发可以有效地使格拉法石层金属化。即使在施加最小剂量后,也能在光发射光谱中观察到费米边缘,从而证实了这一点。此外,由HREELS引起的SiC中光学Fuchs-Kliewer声子的激发被金属超合金显着淬灭,并且电子能量损失谱显示出异质半导体表面上的均匀金属薄层的典型特征。

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