MICRO-HOTPLATE, AN USEFUL CONCEPT FOR GAS SENSING, FLUIDICS AND SPACE APPLICATIONS

摘要

Thermally isolated heaters on membranes, commonly called micro-hotplates, have been developed for about 15 years. They have found applications in different transducers such as in thermal sensors, thermal actuators and gas sensors. Depending on the application, different materials and fabrication techniques have been involved over the years in the fabrication of these devices. After a brief summary of the work performed so far in this field, the technology used at the Institute of Microtechnology (IMT) will be described for different applications. The work performed on micro-hotplates at IMT has started on gas sensing applications to finally be generalized to fluidics and space applications.