Scanning Electron-Beam Dielectric Microscopy for the Temperature Coefficient Distribution of Dielectric Materials

摘要

Studies on scanning electron-beam dielectric microscopy (SEDM) are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light beam as in photothermal dielectric microscopy. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO_2 and Bi_2Ti_4O_(11) is measured. To shorten a measurement time, a new type of SEDM for measuring the real time transient response caused by a single pulsed electron-beam is also successfully developed. Finally, a quantitative measurement method of temperature coefficient is also developed.