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High-resolution EUV spectroscopy: performance of spherical multilayer-coated gratings operated at near normal incidence

机译:高分辨率EUV光谱:接近垂直入射的球形多层镀膜光栅的性能

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Abstract: A program is underway at the Naval Research Laboratory (NRL) to develop a high-resolution spectrometer for the study of astrophysical sources at EUV/soft X-ray wavelengths. The spectrometer design is simple in that the sole optic is a multilayer-coated spherical grating or mosaic of co-aligned gratings used at near-normal incidence, allowing large effective collecting area without the strict tolerance requirements of grazing incidence optics. Therefore, both high resolution and high throughput can be obtained over several selected narrow bandpasses. We present efficiency and resolving power measurements of spherical gratings which have parameters similar to that intended for our flight instrument. Two gratings were replicated from the same ruled master and then coated with a multilayer of molybdenum and silicon. A third sister grating was used as a control and overcoated with gold.!18
机译:摘要:海军研究实验室(NRL)正在开发一个程序,以开发一种高分辨率光谱仪,用于研究EUV /软X射线波长下的天体资源。光谱仪的设计很简单,因为唯一的光学器件是多层镀膜的球形光栅或在接近法线入射时使用的共对准光栅的镶嵌,从而在没有严格限制掠入射光学器件的公差要求的情况下,可以实现较大的有效收集面积。因此,可以通过几个选定的窄带通获得高分辨率和高吞吐量。我们介绍了球形光栅的效率和分辨能力测量结果,这些参数的参数与我们的飞行仪表所用参数相似。从相同的直纹原版复制两个光栅,然后涂上多层钼和硅。第三个姊妹光栅被用作对照,并用金覆盖。18

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