Finite Element Modeling of Capacitive Micromachined Ultrasonic Transducers

摘要

Transducers based on piezoelectric crystals dominate the biomedical ultrasonic imaging field. However, fabricationdifficulties for piezoelectric transducers limit their usage for complex imaging modalities such as 2D imaging, highfrequency imaging, and forward looking intravascular imaging. Capacitive micromachined ultrasonic transducers(CMUTs) have been proposed to overcome these limitations and they offer competitive advantages in terms ofbandwidth and dynamic range. Further, the ease of fabrication enables manufacturing of complex array geometries. ACMUT transducer is composed of many electrostatically actuated membranes. Earlier analysis of these devicesconcentrated on an equivalent circuit approach, which assumed the motion of the membrane was approximated by aparallel plate capacitor. Finite element analysis is required for more accurate results. In this paper, we present the finiteelement model developed to evaluate the performance of the CMUTs. The model is composed of a membrane radiatinginto immersion medium. Electrostatic actuation is added on using electromechanical elements. Symmetry boundaryconditions are imposed around the sidewalls of the finite element mesh, so that the model reflects the properties of a celldriven with the same phase as its neighboring membranes in an infinitely large array. Absorbing boundaries areimplemented one wavelength away from the membrane to avoid reflections from the end of the finite element mesh.Using the model, we optimized the membrane radius, membrane thickness and gap height. Our optimized designedyielded a center frequency of 13 MHz with hundred percent bandwidth. A maximum output pressure of 20 kPascal pervolt was obtained.